PLASMA POLYMERIZATION OF HEXAMETHYLCYCLOTRISILOXANE*

YU Zili; YE Mu; LU Lizhen; CHEN Jie

Your Location：

Home >

Browse articles >

PLASMA POLYMERIZATION OF HEXAMETHYLCYCLOTRISILOXANE*

Papers | Updated：2021-06-21

- PLASMA POLYMERIZATION OF HEXAMETHYLCYCLOTRISILOXANE*
- Vol. 7, Issue 2, Pages: 111-118(1989)
- Affiliations：
  
  1. Changchun Institute of Applied Chemistry, Academia Sinica,Changchun
  2. Academia Sinica
  3. Changchun
- Author bio：
- Funds：
- DOI：
  CLC：
Scan for full text
YU Zili, YE Mu, LU Lizhen, et al. PLASMA POLYMERIZATION OF HEXAMETHYLCYCLOTRISILOXANE*. [J]. 7(2):111-118(1989)
DOI：

YU Zili, YE Mu, LU Lizhen, et al. PLASMA POLYMERIZATION OF HEXAMETHYLCYCLOTRISILOXANE*. [J]. 7(2):111-118(1989) DOI：

摘要

<,正,>, In a capacitively coupled RF discharge system with external electrodes ,hexamethyicyclotrisiloxane was polymerized, and the effects of discharge power and plasma gas on polymer deposition rate were studied. The polymer structures and properties were studied by IR spectroscopy, XPS measurement, PGC/MS combined technique, TG analysis and contact angle measuring. The results showed that the polymers prepared in H,2, or O,2, have higher C/Si ratio in comparison with those prepared in inert gases. PGC/MS results revealed the existence of many short carbon chains in the polymer structure .TG analysis suggested that the polymers prepared in the inert gas would possess better thermal stabilities.

Abstract

In a capacitively coupled RF discharge system with external electrodes ,hexamethyicyclotrisiloxane was polymerized, and the effects of discharge power and plasma gas on polymer deposition rate were studied. The polymer structures and properties were studied by IR spectroscopy, XPS measurement, PGC/MS combined technique, TG analysis and contact angle measuring. The results showed that the polymers prepared in H ,2, or O,2, have higher C/Si ratio in comparison with those prepared in inert gases. PGC/MS results revealed the existence of many short carbon chains in the polymer structure .TG analysis suggested that the polymers prepared in the inert gas would possess better thermal stabilities.

关键词

Keywords

references

Views

Downloads

CSCD

Alert me when the article has been cited

Submit

Tools

Publicity Resources

No data

Related Author

No data

Related Institution

No data

⁰