PEN/BADCy Interlayer Dielectric Films with Tunable Microstructures <italic style="font-style: italic">via</italic> an Assist of Temperature for Enhanced Frequency Stability

Xi-Ting Lei; Li-Fen Tong; Ming-Zhen Xu; Yong You; Xiao-Bo Liu

doi:10.1007/s10118-020-2417-7

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PEN/BADCy Interlayer Dielectric Films with Tunable Microstructures via an Assist of Temperature for Enhanced Frequency Stability

ARTICLE | Updated：2020-05-18

- PEN/BADCy Interlayer Dielectric Films with Tunable Microstructures via an Assist of Temperature for Enhanced Frequency Stability
- PEN/BADCy Interlayer Dielectric Films with Tunable Microstructures via an Assist of Temperature for Enhanced Frequency Stability
- Chinese Journal of Polymer Science 2020年38卷第11期页码：1258-1266
- Affiliations：
  
  School of Materials and Energy, University of Electronic Science and Technology of China, Chengdu 610054, China
- Author bio：
  
  tonglifen0214@163.com (L.F.T.)
  liuxb@uestc.edu.cn (X.B.L.)
- Funds：
  
  This work was financially supported by the National Natural Science Foundation of China (Nos. 51603029 and 51773028), China Postdoctoral Science Foundation (No. 2017M623001), and National Postdoctoral Program for Innovative Talents (No. BX201700044).
- DOI：10.1007/s10118-020-2417-7
  中图分类号：
- 收稿：2020-02-10，
  
  修回：2020-2-28，
  
  录用：2020-3-4，
  
  网络首发：2020-05-18，
  
  纸质出版：2020-08-14
- Accepted：
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Lei, X. T.; Tong, L. F.; Xu, M. Z.; You, Y.; Liu, X. B. PEN/BADCy interlayer dielectric films with tunable microstructures , via, an assist of temperature for enhanced frequency stability. Chinese J. Polym. Sci. 2020, 38, 1258–1266

Xi-Ting Lei, Li-Fen Tong, Ming-Zhen Xu, et al. PEN/BADCy Interlayer Dielectric Films with Tunable Microstructures via an Assist of Temperature for Enhanced Frequency Stability[J]. Chinese Journal of Polymer Science, 2020, 38(11): 1258-1266. DOI: 10.1007/s10118-020-2417-7.
Lei, X. T.; Tong, L. F.; Xu, M. Z.; You, Y.; Liu, X. B. PEN/BADCy interlayer dielectric films with tunable microstructures , via, an assist of temperature for enhanced frequency stability. Chinese J. Polym. Sci. 2020, 38, 1258–1266 DOI： 10.1007/s10118-020-2417-7.

Xi-Ting Lei, Li-Fen Tong, Ming-Zhen Xu, et al. PEN/BADCy Interlayer Dielectric Films with Tunable Microstructures via an Assist of Temperature for Enhanced Frequency Stability[J]. Chinese Journal of Polymer Science, 2020, 38(11): 1258-1266. DOI: 10.1007/s10118-020-2417-7. DOI：

摘要

Abstract

Low dielectric interlayer films have become an important element to ensure the development of the microelectronics industry. A kind of flexible interlayer dielectrics

polyarylene ether nitrile/bisphenol A cyanate ester (PEN/BADCy) film

with good thermal stability and low frequency dependence

has been developed by solution casting method. Herein

materials were designed to incorporate bisphenol A cyanate ester as a part of blend

contributing to the frequency stability and structural integrity. The morphological study combined with electron microscopy revealed the uniform and flexible microstructure information with controllable morphology through self-polymerization of cyanate esters with different prepolymerization time and curing temperatures. The dielectric films could present high thermal stability with

180 °C. Significant improvement in the dielectric properties was achieved for the dielectric constant and loss was much stabler than neat PEN over the frequency range from 100 Hz to 5 MHz. When the prepolymerization time was 3 h and final curing temperature reached 230 °C

the dielectric constant and dielectric loss of the films were 3.36 and 0.013 at 100 kHz

respectively. The dimensional stability (CTE = 53.67 × 10

−6

−1

) was confirmed and considered beneficial to use as an interlayer dielectrics.

关键词

Keywords

references

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DOI：10.1007/s10118-020-2417-7

摘要

Abstract

关键词

Keywords

references