From Self-assembled Monolayers to Chemically Patterned Brushes: Controlling the Orientation of Block Copolymer Domains in Films by Substrate Modification

Jin Xiao-sa; Pang Yuan-yuan; Ji Sheng-xiang

doi:10.1007/s10118-016-1800-x

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From Self-assembled Monolayers to Chemically Patterned Brushes: Controlling the Orientation of Block Copolymer Domains in Films by Substrate Modification

Reivew | Updated：2022-02-21

- From Self-assembled Monolayers to Chemically Patterned Brushes: Controlling the Orientation of Block Copolymer Domains in Films by Substrate Modification
- From Self-assembled Monolayers to Chemically Patterned Brushes: Controlling the Orientation of Block Copolymer Domains in Films by Substrate Modification
- 高分子科学（英文版） 2016年34卷第6期页码：659-678
- Affiliations：
  
  a.Key Laboratory of Polymer Ecomaterials, Changchun Institute of Applied Chemistry, Chinese Academy of Sciences, Changchun 130022, China
  b.University of Chinese Academy of Sciences, Beijing 100049, China
- Author bio：
  
  Sheng-xiang Ji (季生象), E-mail: sji@ciac.ac.cn
- Funds：
  
  This work was financially supported by the National Natural Science Foundation of China(Nos. 51173181 and 51373166);"The Hundred Talents Program" from the Chinese Academy of Sciences and the International S&T Cooperation Program from Department of Science and Technology of Jilin Province(No. 20160414032GH)
- DOI：10.1007/s10118-016-1800-x
  中图分类号：
- 收稿：2016-02-18，
  
  修回：2016-3-13，
  
  录用：2016-3-2，
  
  纸质出版：2016-06
- Accepted：
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Jin Xiao-sa, Pang Yuan-yuan, Ji Sheng-xiang. From Self-assembled Monolayers to Chemically Patterned Brushes: Controlling the Orientation of Block Copolymer Domains in Films by Substrate Modification[J]. 高分子科学（英文版）, 2016,34(6):659-678.

From Self-assembled Monolayers to Chemically Patterned Brushes: Controlling the Orientation of Block Copolymer Domains in Films by Substrate Modification[J]. 2016, 34(6): 659-678.
Jin Xiao-sa, Pang Yuan-yuan, Ji Sheng-xiang. From Self-assembled Monolayers to Chemically Patterned Brushes: Controlling the Orientation of Block Copolymer Domains in Films by Substrate Modification[J]. 高分子科学（英文版）, 2016,34(6):659-678. DOI： 10.1007/s10118-016-1800-x.

From Self-assembled Monolayers to Chemically Patterned Brushes: Controlling the Orientation of Block Copolymer Domains in Films by Substrate Modification[J]. 2016, 34(6): 659-678. DOI： 10.1007/s10118-016-1800-x.

摘要

Abstract

Block copolymer lithography is emerging as one of the leading technologies for patterning nanoscale dense features. In almost all potential applications of this technology

control over the orientation of cylindrical and lamellar domains is required for pattern transfer from the block copolymer film. This review highlights the state-of-art development of brushes to modify the substrates to control the assembly behaviors of block copolymers in films. Selected important contributions to the development of self-assembled monolayers

polymer brushes and mats

and chemically patterned brushes are discussed.

关键词

Keywords

references

http://www.itrs.net http://www.itrs.net

D.J.C. Herr, . J. Mater. Res. , 2011 . 26 122 .

M.W Matsen, , F.S. Bates, . Macromolecules , 1996 . 29 1091 .

P. Mansky, , C.K. Harrison, , P.M.Register, R.A Chaikin, , N. Yao, . Appl. Phys. Lett. , 1996 . 68 2586 .

M. Park, , C. Harrison, , P.M. Chaikin, , R.A Register, , D.H. Adamson, . Science , 1997 . 276 1401 .

S.X. Ji, , L. Wan, , C.C Liu, , P.F. Nealey, . Prog. Polym. Sci. , 2016 . 54 - 55 . .

M.P Stoykovich, , P.F. Nealey, . Mater. Today , 2006 . 9 20 .

S. Park, , D.H. Lee, , J. Xu, , B. Kim, , S.W. Hong, , U. Jeong, , T.Russell, T.P. Xu, . Science , 2009 . 323 1030 .

K.G. Yager, , B.C. Berry, , K. Page, , D. Patton, , A.Amis, E.J. Karim, . Soft Matter. , 2009 . 5 622 .

T.L. Morkved, , M. Lu, , A.M. Urbas, , E.E. Ehrichs, , H. M. Jaeger, , P.Russell, T.P. Mansky. . Science , 1996 . 273 931 .

P.W. Majewski, , M. Gopinadhan, , W.S. Jang, , J.L Lutkenhaus, , C.O. Osuji, . J. Am. Chem. Soc. , 2010 . 132 17516 .

S.H. Kim, , M.J. Misner, , T. Xu, , M.Russell, T.P. Kimura, . Adv. Mater. , 2004 . 16 226 .

S. Park, , B. Kim, , J. Xu, , T. Hofmann, , B.M Ocko, , T.P. Russell, . Macromolecules , 2009 . 42 1278 .

Y. Tada, , H. Yoshida, , Y. Ishida, , T. Hirai, , J.K.Dobisz, E. Bosworth, , R. Ruiz, , M. Takenaka, , T.Hasegawa, H. Hayakawa, . Macromolecules , 2012 . 45 292 .

J. Bang, , U. Jeong, , D.Y. Ryu, , T.P Russell, , C.J. Hawker, . Adv. Mater. , 2009 . 21 4769 .

C.M. Bates, , M.J. Maher, , D.W. Janes, , C.J Ellison, , C.G. Willson, . Macromolecules , 2014 . 47 2 .

H.C. Kim, , S.M Park, , W.D. Hinsberg, . Chem. Rev. , 2010 . 110 146 .

M.Epps, T.H. Luo, . Macromolecules , 2013 . 46 7567 .

F.S. Bates, . Science , 1991 . 251 898 .

F.S Bates, , G.H. Fredrickson, . Annu. Rev. Phys. Chem. , 1990 . 41 525 .

F.S Bates, , G.H. Fredrickson, . Phys. Today , 1999 . 52 32 .

F.S. Bates, , M.A. Hillmyer, , T.P. Lodge, , C.M. Bates, , K.T Delaney, , G.H. Fredrickson, . Science , 2012 . 336 434 .

G.H Fredrickson, , F.S. Bates, . Annu. Rev. Mater. Sci. , 1996 . 26 501 .

M.J Fasolka, , A.M. Mayes, . Annu. Rev. Mater. Res. , 2001 . 31 323 .

G. Coulon, , T.P. Russell, , V.R Deline, , P.F. Green, . Macromolecules , 1989 . 22 2581 .

T.P. Russell, , G. Coulon, , V.R Deline, , D.C. Miller, . Macromolecules , 1989 . 22 4600 .

G. Coulon, , D.Russell, T.P. Ausserre, . J. Phys.-Paris , 1990 . 51 777 .

G. Coulon, , B. Collin, , D. Ausserre, , D.Russell, T.P. Chatenay, . J. Phys.-Paris , 1990 . 51 2801 .

S.X. Ji, , C.C. Liu, , J.G. Son, , K. Gotrik, , G.S.W. Craig, , P. Gopalan, , F.J. Himpsel, , K.Nealey, P.F. Char, . Macromolecules , 2008 . 41 9098 .

S. Kim, , C.M. Bates, , A. Thio, , J.D. Cushen, , C.J. Ellison, , C.G Willson, , F.S. Bates, . ACS Nano , 2013 . 7 9905 .

M.J. Fasolka, , P. Banerjee, , A.M. Mayes, , G.Balazs, A.C. Pickett, . Macromolecules , 2000 . 33 5702 .

G.T. Pickett, , T.A Witten, , S.R. Nagel, . Macromolecules , 1993 . 26 3194 .

C. Harrison, , M. Park, , P. Chaikin, , R.A.Adamson, D.H Register, , N. Yao, . Macromolecules , 1998 . 31 2185 .

X.H. Zhang, , B.C. Berry, , K.G. Yager, , S. Kim, , R.L. Jones, , S. Satija, , D.L.Douglas, J.F Pickel, , A. Karim, . ACS Nano , 2008 . 2 2331 .

A. Horvat, , A. Knoll, , G. Krausch, , L. Tsarkova, , K.S. Lyakhova, , G.J.A.Zvelindovsky, A.V Sevink, , R. Magerle, . Macromolecules , 2007 . 40 6930 .

A. Knoll. , A. Horvat, , K.S. Lyakhova, , G. Krausch, , G.J.A. Sevink, . Zvelindovsky, A.V, Magerle, R., Phys. Rev. Lett. , 2002 . 89 035501 .

S.X. Ji, , C.C. Liu, , W. Liao, , A.L. Fenske, , G.S.W Craig, , P.F. Nealey, . Macromolecules , 2011 . 44 4291 .

G.E. Stein, , E.W. Cochran, , K. Katsov, , G.H. Fredrickson, , E.J.Li, X.Wang, J. Kramer, . Phys. Rev. Lett. , 2007 . 98 158302 .

G.E. Stein, , E.J.Li, X.F Kramer, , J. Wang, . Macromolecules , 2007 . 40 2453 .

J.Kramer, E.J. Genzer, . Phys. Rev. Lett. , 1997 . 78 4946 .

G. Nisato, , B.D.Douglas, J.F Ermi, , A. Karim, . Macromolecules , 1999 . 32 2356 .

A. Karim, , J.F. Douglas, , B.P. Lee, , S.C. Glotzer, , J.A. Rogers, , R.J. Jackman, , E.J Amis, , G.M. Whitesides, . Phys. Rev. E , 1998 . 57 6273 .

M. Boltau, , S. Walheim, , J. Mlynek, , G. Steiner, U. Krausch, . Nature , 1998 . 391 877 .

J. Heier, , E.J.Walheim, S.Krausch, G. Kramer, . Macromolecules , 1997 . 30 6610 .

J. Heier, , J. Genzer, , E.J. Kramer, , F.S.Walheim, S.Krausch, G., J. Bates, . Chem. Phys. , 1999 . 111 11101 .

J. Heier, , E.Kramer, E.J. Sivaniah, . Macromolecules , 1999 . 32 9007 .

J. Heier, , E.J. Kramer, , J.Fredrickson, G.H. Groenewold, . Macromolecules , 2000 . 33 6060 .

E. Delamarche, , B. Michel, , C. Gerber, , D. Anselmetti, , H.J.Wolf, H.Ringsdorf, H. Guntherodt, . Langmuir , 1994 . 10 2869 .

E. Delamarche, , B. Michel, , H. Gerber, C. Kang, . Langmuir , 1994 . 10 4103 .

G.J Kluth, , M.M. Sung, . Langmuir , 1997 . 13 3775 .

P. Silberzan, , L. Leger, , D.Benattar, J.J. Ausserre, . Langmuir , 1991 . 7 1647 .

J.B.Shahidzadeh, N.Rondelez, F. Brzoska, . Nature , 1992 . 360 719 .

J.B.Benazouz, I.Rondelez, F. Brzoska, . Langmuir , 1994 . 10 4367 .

A.N. Parikh, , D.L.Azouz, I.B Allara, , F., J. Rondelez, . Phys. Chem. , 1994 . 98 7577 .

R.D. Peters, , X.M. Yang, , T.K Kim, , P.F. Nealey, . Langmuir , 2000 . 16 9620 .

R.D. Peters, , X.M. Yang, , T.K. Kim, , B.H Sohn, , P.F. Nealey, . Langmuir , 2000 . 16 4625 .

R.D. Peters, , X.M Yang, , P.F. Nealey, . Macromolecules , 2002 . 35 1822 .

T.K. Kim, , X.M. Yang, , R.D. Peters, , B.H Sohn, , P.F. Nealey, . J. Phys. Chem. B , 2000 . 104 7403 .

X.M. Yang, , R.D. Peters, , P.F.Solak, H.H Nealey, , F. Cerrina, . Macromolecules , 2000 . 33 9575 .

J.N.L. Albert, , M.J. Baney, , C.M. Stafford, , J.Y Kelly, , T.H. Epps, . ACS Nano , 2009 . 3 3977 .

G.J. Kellogg, , D.G. Walton, , A.M. Mayes, , P. Lambooy, , T.P. Russell, , P.D Gallagher, , S.K. Satija, . Phys. Rev. Lett. , 1996 . 76 2503 .

D.G. Walton, , G.J. Kellogg, , A.M. Mayes, , P.Russell, T.P. Lambooy, . Macromolecules , 1994 . 27 6225 .

P. Mansky, , Y. Liu, , E. Huang, , T.P Russell, , C.J. Hawker, . Science , 1997 . 275 1458 .

E. Huang, , T.P. Russell, , C. Harrison, , P.M. Chaikin, , R.A. Hawker, C.J Register, , J. Mays, . Macromolecules , 1998 . 31 7641 .

E. Huang, , P. Mansky, , T.P. Russell, , C. Harrison, , P.M. Chaikin, , R.A.Hawker, C.J Register, , J. Mays, . Macromolecules , 1999 . 33 80 .

P. Mansky, , T.P. Russell, , C.J. Hawker, , J. Mays, , D.C Cook, , S.K. Satija, . Phys. Rev. Lett. , 1997 . 79 237 .

P. Mansky, , T.P. Russell, , C.J.Pitsikalis, M.Mays, J. Hawker, . Macromolecules , 1997 . 30 6810 .

S. Ham, , C. Shin, , E. Kim, , D.Y. Ryu, , U. Jeong, , T.P Russell, , C.J. Hawker, . Macromolecules , 2008 . 41 6431 .

E. Han, , K.O. Stuen, , Y.H.Nealey, P.F La, , P. Gopalan, . Macromolecules , 2008 . 41 9090 .

B.H. Kim, , D.H. Lee, , J.Y. Kim, , D.O. Shin, , H.Y. Jeong, , S. Hong, , J.M. Yun, , C.M. Koo, , H.Kim, S.O. Lee, . Adv. Mater. , 2011 . 23 5618 .

E. Huang, , S. Pruzinsky, , T.P. Russell, , J.Hawker, C.J. Mays, . Macromolecules , 1999 . 32 5299 .

I. In, , Y.H. La, , S.M.Nealey, P.F Park, , P. Gopalan, . Langmuir , 2006 . 22 7855 .

B.B Sauer, , G.T. Dee, . Macromolecules , 2002 . 35 7024 .

C.M. Bates, , T. Seshimo, , M.J. Maher, , W.J. Durand, , J.D. Cushen, , L.M. Dean, , G. Blachut, , C.J Ellison, , C.G. Willson, . Science , 2012 . 338 775 .

H. Yoshida, , H.S. Suh, , A. Ramirez-Hernandez, , J.I. Lee, , K. Aida, , L. Wan, , Y. Ishida, , Y. Tada, , R. Ruiz, , Pablo, J.Nealey, P.F. de . J. Photopolym. Sci. Technol. , 2013 . 26 55 .

D.Y. Ryu, , K. Shin, , E. Drockenmuller, , C.J Hawker, , T.P. Russell, . Science , 2005 . 308 236 .

J. Bang, , J. Bae, , P. Löwenhielm, , C. Spiessberger, , S.A. Given-Beck, , T.P Russell, , C.J. Hawker, . Adv. Mater. , 2007 . 19 4552 .

E. Han, , I. In, , S.M. Park, , Y.H.Wang, Y. La, , P.F Nealey, , P. Gopalan, . Adv. Mater. , 2007 . 19 4448 .

H. Jung, , F.A..[J].Woo, S. Leibfarth, , S. Lee, , M. Kang, , B. Moon, , C.J Hawker, , J. Bang, . Adv. Funct. Mater , 2013 . 23 1597 .

S. X. Ji, , G. Liu, , F. Zheng, , G.S.W. Craig, , F.J Himpsel, , P.F. Nealey, . Adv. Mater. , 2008 . 20 3054 .

G.L. Liu, , S.X. Ji, , K.O. Stuen, , G.S.W. Craig, , P.F Nealey, , F.J. Himpsel, . J. Vac. Sci. Technol, B , 2009 . 27 3038 .

M.S. She, , T.Y Lo, , R.M. Ho, . ACS Nano , 2013 . 7 2000 .

R. Guo, , E. Kim, , J. Gong, , S. Choi, , S.Ryu, D.Y. Ham, . Soft Matter , 2011 . 7 6920 .

S.X. Ji, , C.C. Liu, , G.L Liu, , P.F. Nealey, . ACS Nano , 2010 . 4 599 .

M.S. Onses, , C.J. Thode, , C.C. Liu, , S.X. Ji, , P.L. Cook, , F.J Himpsel, , P.F. Nealey, . Adv. Funct. Mater. , 2011 . 21 3074 .

C.J. Thode, , P.L. Cook, , Y.M. Jiang, , M.S. Onses, , S.X. Ji, , F.J Himpsel, , P.F. Nealey, . Nanotechnology , 2013 . 24 155602 .

S.X. Ji, , W.Nealey, P.F. Liao, . Macromolecules , 2010 . 43 6919 .

S.O. Kim, , H.H. Solak, , M.P. Stoykovich, , N.J. Ferrier, , Pablo, J.J de , P.F. Nealey, . Nature , 2003 . 424 411 .

M.P. Stoykovich, , H. Kang, , K.C. Daoulas, , G. Liu, , C.C. Liu, , Pablo, J.J de , P.F. Nealey, . ACS Nano , 2007 . 1 168 .

M.P. Stoykovich, , M. Muller, , S.O. Kim, , H.H. Solak, , E.W. Edwards, , Pablo, J.J de , P.F. Nealey, . Science , 2005 . 308 1442 .

E.W. Edwards, , M.F. Montague, , H.H. Solak, , C.J Hawker, , P.F. Nealey, . Adv. Mater. , 2004 . 16 1315 .

E.W. Edwards, , M. Muller, , M.P. Stoykovich, , H.H. Solak, , Pablo, J.J de , P.F. Nealey, . Macromolecules , 2007 . 40 90 .

C.C. Liu, , E. Han, , M.S. Onses, , C.J. Thode, , S.X. Ji, , P.Nealey, P.F. Gopalan, . Macromolecules , 2011 . 44 1876 .

C.C. Liu, , A. Ramirez-Hernandez, , E. Han, , G.S.W. Craig, , Y. Tada, , H. Yoshida, , H.M. Kang, , S.X. Ji, , P. Gopalan, , Pablo, J.J de , P.F. Nealey, . Macromolecules , 2013 . 46 1415 .

G.M. Wilmes, , D.A. Durkee, , N.P Balsara, , J.A. Liddle, . Macromolecules , 2006 . 39 2435 .

S.X. Ji, , U. Nagpal, , W. Liao, , C.C. Liu, , Pablo, J.J de , P.F. Nealey, . Adv. Mater. , 2011 . 23 3692 .

R. Ruiz, , H.M. Kang, , F.A. Detcheverry, , E. Dobisz, , D.S. Kercher, , T.R. Albrecht, , Pablo, J.J de , P.F. Nealey, . Science , 2008 . 321 936 .

S.X. Ji, , U. Nagpal, , G.L. Liu, , S.P. Delcambre, , M. Muller, , Pablo, J.J de , P.F. Nealey, . ACS Nano , 2012 . 6 5440 .

J.Y. Cheng, , C.T. Rettner, , D.P. Sanders, , H.C Kim, , W.D. Hinsberg, . Adv. Mater. , 2008 . 20 3155 .

H.M. Kang, , G.S.W. Craig, , E. Han, , P.Nealey, P.F. Gopalan, . Macromolecules , 2012 . 45 159 .

G.L. Liu, , C.S. Thomas, , G.S.W Craig, , P.F. Nealey, . Adv. Funct. Mater. , 2010 . 20 1251 .

Y. Tada, , S. Akasaka, , H. Yoshida, , H. Hasegawa, , E. Dobisz, , D.Takenaka, M. Kercher, . Macromolecules , 2008 . 41 9267 .

L.Yang, X.M. Wan, . Langmuir , 2009 . 25 12048 .

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