A study has been made on the plasma polymerization of acetylene/CO
2
/H
2
in a capacitively coupled RF plasma. The monomer mixture yielded a crosslinked film with light brown color. A kinetic study is reported for the plasma polymer ization of acetylene/CO
2
/H
2
. The effects of discharge power level and reactor geometry on the rate of polymer formation are reported. The structure of the plasma polymer is investigated by IR study.
Abstract
A study has been made on the plasma polymerization of acetylene/CO
2
/H
2
in a capacitively coupled RF plasma. The monomer mixture yielded a crosslinked film with light brown color. A kinetic study is reported for the plasma polymer ization of acetylene/CO
2
/H
2
. The effects of discharge power level and reactor geometry on the rate of polymer formation are reported. The structure of the plasma polymer is investigated by IR study.
关键词
Keywords
references
The trial reading is over, you can activate your VIP account to continue reading.