Rapid Conversion of Perhydropolysilazane into Thin Silica Coating at Low Temperature

Wen-Yue Wang; Yu-Lin Zhang; Xiang Guo; Li-Ming Wang; Jun-Rong Zhang; Hui Yang; Guo-Jun Dong; Zong-Bo Zhang; Cai-Hong Xu

doi:10.1007/s10118-023-2959-6

Your Location：

Home >

Browse articles >

Rapid Conversion of Perhydropolysilazane into Thin Silica Coating at Low Temperature

RESEARCH ARTICLE | Updated：2023-07-18

- Rapid Conversion of Perhydropolysilazane into Thin Silica Coating at Low Temperature
- Chinese Journal of Polymer Science Vol. 41, Issue 8, Pages: 1198-1205(2023)
- Affiliations：
  
  a.Key Laboratory of Science and Technology on High-tech Polymer Materials, Institute of Chemistry, Chinese Academy of Sciences, Beijing 100190, China
  b.Yantai Research Institute, Harbin Engineering University, Yantai 264000, China
  c.Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, China
  d.Spallation Neutron Source Science Center, Dongguan 523803, China
- Author bio：
  
  dgj1129@163.com (G.J.D.)
  zongbo@iccas.ac.cn (Z.B.Z.)
- Funds：
- DOI：10.1007/s10118-023-2959-6
  CLC：
- Received：27 December 2022，
  
  Revised：2023-1-19，
  
  Accepted：31 January 2023，
  
  Online First：17 March 2023，
  
  Published：01 August 2023
- Accepted：
Scan QR Code
Wang, W. Y.; Zhang, Y. L.; Guo, X.; Wang, L. M.; Zhang, J. R.; Yang, H.; Dong, G. J.; Zhang, Z. B.; Xu, C. H. Rapid conversion of perhydropolysilazane into thin silica coating at low temperature. Chinese J. Polym. Sci. 2023, 41, 1198–1205

Wen-Yue Wang, Yu-Lin Zhang, Xiang Guo, et al. Rapid Conversion of Perhydropolysilazane into Thin Silica Coating at Low Temperature[J]. Chinese Journal of Polymer Science, 2023, 41(8): 1198-1205.
Wang, W. Y.; Zhang, Y. L.; Guo, X.; Wang, L. M.; Zhang, J. R.; Yang, H.; Dong, G. J.; Zhang, Z. B.; Xu, C. H. Rapid conversion of perhydropolysilazane into thin silica coating at low temperature. Chinese J. Polym. Sci. 2023, 41, 1198–1205 DOI： 10.1007/s10118-023-2959-6.

Wen-Yue Wang, Yu-Lin Zhang, Xiang Guo, et al. Rapid Conversion of Perhydropolysilazane into Thin Silica Coating at Low Temperature[J]. Chinese Journal of Polymer Science, 2023, 41(8): 1198-1205. DOI： 10.1007/s10118-023-2959-6.

摘要

Abstract

The conversion of perhydropolysilazane (PHPS) to silica at low temperature is beneficial for its application on thermally vulnerable substrates. In this work

it is demonstrated that (3-aminopropyl)triethoxysilane (APTES) has high catalytic efficiency for the low temperature conversion of PHPS and the catalytic mechanism of APTES was suggested. The influence of temperature and humidity on the catalytic conversion process was investigated

and it was found that PHPS can be rapidly converted to silica in 10 min at 80 °C with relative humidity of 90%. The achieved silica is mainly composed of SiNO

/SiO

OH and SiO

structure with O/Si of 1.74 and N content of 1%. As an approach to prepare inorganic coating

the low-temperature conversion method achieves a silica coating with low volume shrinkage of 0.86%

low roughness of

=0.293 nm

high nanoindentation hardness of 3.62 GPa and modulus of 30.06 GPa

which exhibits high potentials as protective coating for various materials even those vulnerable to high temperature.

关键词

Keywords

references

Zhang,T.T.;Zhou,M.X.;Guo,Z.Y.;Zhao,Y.B.;Han,D.;Xiu,H.;Bai,H.W.;Zhang,Q.;Fu,Q.Improvingimpacttoughnessofpolylactide/ethylene- co -vinyl-acetateblends via addingfumedsilicananoparticles:effectsofspecificsurfacearea-dependentinterfacialselectivedistributionofsilica. Chinese J. Polym. Sci. 2021 , 39 ,1040−1049..

Khodakarami,S.;Zhao,H.Y.;Rabbi,K.F.;Miljkovic,N.Scalablecorrosion-resistantcoatingsforthermalapplications. ACS Appl. Mater. Interfaces 2021 , 13 ,4519−4534..

Fan,L.L.;Quan,J.Y.;Zhang,H.;Yu,J.R.;Hu,Z.M.;Wang,Y.PreparationofhydrophilicUHMWPEhollowfibermembranesbychemicallyboundingsilicananoparticles. Chinese J. Polym. Sci. 2021 , 39 ,189−200..

Monti,M.;DalBianco,B.;Bertoncello,R.;Voltolina,S.Newprotectivecoatingsforancientglass:silicathin-filmsfromperhydropolysilazane. J. Cult. Herit. 2008 , 9 ,E143−E145..

Li,P.F.;Wang,D.;Zhang,Z.B.;Guo,Y.L.;Jiang,L.;Xu,C.H.Room-temperature,solution-processedSiO x via photochemistryapproachforhighlyflexibleresistiveswitchingmemory. ACS Appl. Mater. Interfaces 2020 , 12 ,56186−56194..

Li,P.F.;Zhang,Y.L.;Guo,Y.L.;Jiang,L.;Zhang,Z.B.;Xu,C.H.Resistanceswitchingbehaviorofaperhydropolysilazane-derivedSiO x -basedmemristor. J. Phys. Chem. Lett. 2021 , 12 ,10728−10734..

Back,H.S.;Kim,M.J.;Baek,J.J.;Kim,D.H.;Shin,G.;Choi,K.H.;Cho,J.H.Intense-pulsed-UV-convertedperhydropolysilazanegatedielectricsfororganicfield-effecttransistorsandlogicgates. RSC Adv. 2019 , 9 ,3169−3175..

Blankenburg,L.;Schrodner,M.Perhydropolysilazanederivedsilicaforflexibletransparentbarrierfoilsusingareel-to-reelwetcoatingtechnique:single-andmultilayerstructures. Surf. Coat. Technol. 2015 , 275 ,193−206..

Jin,S.B.;Long,W.;Sahu,B.B.;Han,J.G.;Hori,M.Improvingthegasbarrierandmechanicalpropertiesofa-SiO x filmssynthesizedatlowtemperaturebyusinghighenergyandhydrogenflowratecontrol. J. Korean Phys. Soc. 2015 , 66 ,1410−1415..

Channa,I.A.;Shah,A.A.;Rizwan,M.;Makhdoom,M.A.;Chandio,A.D.;Shar,M.A.;Mahmood,A.Processparameteroptimizationofapolymerderivedceramiccoatingsforproducingultra-highgasbarrier. Materials 2021 , 14 ,7000..

Reichelt,K.;Jiang,X.Thepreparationofthinfilmsbyphysicalvapourdepositionmethods. Thin Solid Films 1990 , 191 ,91−126..

Mattox,D.M.Physicalvapordeposition(PVD)processes. Met. Finish. 2000 , 98 ,410−423..

Boke,F.;Giner,I.;Keller,A.;Grundmeier,G.;Fischer,H.Plasma-enhancedchemicalvapordeposition(PE-CVD)yieldsbetterhydrolyticalstabilityofbiocompatibleSiO x thinfilmsonimplantaluminaceramicscomparedtorapidthermalevaporationphysicalvapordeposition(PVD). ACS Appl. Mater. Interfaces 2016 , 8 ,17805−17816..

Jung,H.;Kim,W.H.;Oh,I.K.;Lee,C.W.;Lansalot-Matras,C.;Lee,S.J.;Myoung,J.M.;Lee,H.B.R.;Kim,H.GrowthcharacteristicsandelectricalpropertiesofSiO 2 thinfilmspreparedusingplasma-enhancedatomiclayerdepositionandchemicalvapordepositionwithanaminosilaneprecursor. J. Mater. Sci. 2016 , 51 ,5082−5091..

Aman,S.G.M;Koretomo,D.;Magari,Y.;Furuta,M.InfluenceofDepositionTemperatureandSourceGasinPE-CVDforSiO 2 PassivationonPerformanceandReliabilityofIn-Ga-Zn-OThin-FilmTransistors. IEEE Trans. Electr. Devices 2018 , 65 ,3257−3263..

Arl,D.;Roge,V.;Adjeroud,N.;Pistillo,B.R.;Sarr,M.;Bahlawane,N.;Lenoble,D.SiO 2 thinfilmgrowththroughapureatomiclayerdepositiontechniqueatroomtemperature. RSC Adv. 2020 , 10 ,18073−18081..

Matsuo,H.;Yamada,K.Topicsoncoating.Ceramiccoatingcapablelow-temperatureformationusinginorganicpolysilazane. Convertech 1995 , 23 ,25−29..

Naganuma,Y.;Horiuchi,T.;Kato,C.;Tanaka,S.Low-temperaturesynthesisofsilicacoatingonapoly(ethyleneterephthalate)filmfromperhydropolysilazaneusingvacuumultravioletlightirradiation. Surf. Coat. Technol. 2013 , 225 ,40−46..

Zhang,Z.B.;Shao,Z.H.;Luo,Y.M.;An,P.Y.;Zhang,M.Y.;Xu,C.H.Hydrophobic,transparentandhardsiliconoxynitridecoatingfromperhydropolysilazane. Polym. Int. 2015 , 64 ,971−978..

Niizeki,T.;Nagayama,S.;Hasegawa,Y.;Miyata,N.;Sahara,M.;Akutsu,K.Structuralstudyofsilicacoatingthinlayerspreparedfromperhydropolysilazane:substratedependenceandwaterpenetrationstructure. Coatings 2016 , 6 ,64..

Zhang,Z.B.;Wang,D.;Xiao,F.Y.;Liang,Q.Y.;Luo,Y.M.;Xu,C.H.Dense,uniform,smoothSiO 2 /TiO 2 hardcoatingsderivedfromasingleprecursorsourceoftetra-nbutyltitanatemodifiedperhydropolysilazane. RSC Adv. 2018 , 8 ,16746−16752..

Kamiya,K.;Tange,T.;Hashimoto,T.;Nasu,H.;Shimizu,H.Formationprocessofsilicaglassthinfilmsfromperhydropolysilazane. Research Reports of the Faculty of Engineering 2001 , 26 ,23−32..

Nakajima,K.;Uchiyama,H.;Kitano,T.;Kozuka,H.Conversionofsolution-derivedperhydropolysilazanethinfilmsintosilicainbasichumidatmosphereatroomtemperature. J. Am. Ceram. Soc. 2013 , 96 ,2806−2816..

Zhan,Y.;Grottenmuller,R.;Li,W.;Javaid,F.;Riedel,R.Evaluationofmechanicalpropertiesandhydrophobicityofroom-temperature,moisture-curablepolysilazanecoatings. J. Appl. Polym. Sci. 2021 , 138 ,e50469..

Morlier,A.;Cros,S.;Garandet,J.P.;Alberola,N.Thingas-barriersilicalayersfromperhydropolysilazaneobtainedthroughlowtemperaturecurings:acomparativestudy. Thin Solid Films 2012 , 524 ,62−66..

Prager,L.;Dierdorf,A.;Liebe,H.;Naumov,S.;Stojanovic,S.;Heller,R.;Wennrich,L.;Buchmeiser,M.R.ConversionofperhydropolysilazaneintoaSiO x networktriggeredbyvacuumultravioletirradiation:accesstoflexible,transparentbarriercoatings. Chem. Eur. J. 2007 , 13 ,8522−8529..

Kubo,T.;Tadaoka,E.;Kozuka,H.Preparationofhotwater-resistantsilicathinfilmsfrompolysilazanesolutionatroomtemperature. J. Sol-gel Sci. Technol. 2004 , 31 ,257−261..

Kubo,T.;Kozuka,H.Conversionofperhydropolysilazane-to-silicathinfilmsbyexposuretovaporfromaqueousammoniaatroomtemperature. J. Ceram. Soc. JAPAN 2006 , 114 ,517−523..

Kozuka,H.;Fujita,M.;Tamoto,S.Polysilazaneasthesourceofsilica:theformationofdensesilicacoatingsatroomtemperatureandthenewroutetoorganic-inorganichybrids. J. Sol-gel Sci. Technol. 2008 , 48 ,148−155..

Lee,J.S.;Oh,J.H.;Moon,S.W.;Sul,W.S.;KimS.D.ATechniqueforConvertingPerhydropolysilazanetoSiO x atLowTemperature. Electrochem. Solid ST. 2010 , 13 ,H23−H25..

Jung,S.H.;Lee,J.S.;Oh,J.H.;Moon,S.W.;Kim,S.D.Methodoflow-temperatureconversionofpehydropolysilazaneintoamorphousSiO x inaqueoussolutions. Jpn. J. Appl. Phys. 2010 , 49 ,111505..

Bauer,F.;Decker,U.;Dierdorf,A.;Ernst,H.;Heller,R.;Liebe,H.;Mehnert,R.Preparationofmoisturecurablepolysilazanecoatings.PartI.ElucidationoflowtemperaturecuringkineticsbyFT-IRspectroscopy. Prog. Org. Coat. 2005 , 53 ,183−190..

Je,S.Y.;Son,B.G.;Kim,H.G.;Park,M.Y.;Do,L.M.;Choi,R.;Jeong,J.K.Solution-processableLaZrO x /SiO 2 gatedielectricatlowtemperatureof180°Cforhigh-performancemetaloxidefield-effecttransistors. ACS Appl. Mater. Interfaces 2014 , 6 ,18693−18703..

Oliver,W.C.;Pharr,G.M.Animprovedtechniquefordetermininghardnessandelasticmodulususingloadanddisplacementsensingindentationexperiments. J. Mater. Res. 1992 , 7 ,1564−1583..

Xu,D.S.;Sun,L.;Li,H.L.;Zhang,L.;Guo,G.L.;Zhao,X.S.;Gui,L.L.Hydrolysisandsilanizationofthehydrosiliconsurfaceoffreshlypreparedporoussiliconbyanaminecatalyticreaction. New J. Chem. 2003 , 27 ,300−306..

Perera,D.Y.;Selier,P.Watertransportinorganiccoatings. Prog. Org. Coat. 1973 , 2 ,57−80..

Chen,Q.;Zhang,X.S.;Wang,F.Experimentalstudyofthermaldiffusionenhancedvaportransferperformancewithperhydropolysilazane-derivedsilica(PDS)coatingmembranesinairdehumidificationprocess. Int. J. Refrig. 2021 , 122 ,21−32..

Gunthner,M.;Wang,K.;Bordia,R.K.;Motz,G.Conversionbehaviourandresultingmechanicalpropertiesofpolysilazane-basedcoatings. J. Eur. Ceram. Soc. 2012 , 32 ,1883−1892..

Muller,S.;deHazan,Y.;Penner,D.Effectoftemperature,humidityandaminoalkoxysilaneadditiveonthelowtemperaturecuringofpolyorganosilazanecoatingsstudiedbyIRspectroscopy,gravimetricandevolvedgasanalysis. Prog. Org. Coat. 2016 , 97 ,133−145..

Kang,Y.H.;Min,B.K.;Kim,S.K.;Bae,G.;Song,W.;Lee,C.;Cho,S.Y.;An,K.S.Protonconductingperhydropolysilazane-derivedgatedielectricforsolution-processedmetaloxide-basedthin-filmtransistors. ACS Appl. Mater. Interfaces 2020 , 12 ,15396−15405..

Iwamoto,Y.;Kikuta,K.I.;Hirano,S.I.Si 3 N 4 -TiN-Y 2 O 3 ceramicsderivedfromchemicallymodifiedperhydropolysilazane. J. Mater. Res. 1999 , 14 ,4294−4301..

Lin,R.Y.;Carlstrom,G.;Pham,Q.D.;Anderson,M.W.;Topgaard,D.;Edler,K.J.;Alfredsson,V.Kineticinfluenceofsiliceousreactionsonstructureformationofmesoporoussilicaformed via theco-structuredirectingagentroute. J. Phys. Chem. C 2016 , 120 ,3814−3821..

Miloskovska,E.;Hansen,M.R.;Friedrich,C.;Hristova-Bogaerds,D.;vanDuin,M.;deWith,G. In situ silicananoparticleformationinarubbermatrixmonitored via real-timeSAXSandsolid-stateNMRspectroscopy. Macromolecules 2014, 47 ,5174-5185..

Yang,C.C.;Chen,W.C.Thestructuresandpropertiesofhydrogensilsesquioxane(HSQ)filmsproducedbythermalcuring. J. Mater. Chem. 2002 , 12 ,1138−1141..

Nikitin,T.;Velagapudi,R.;Sainio,J.;Lahtinen,J.;Rasanen,M.;Novikov,S.;Khriachtchev,L.OpticalandstructuralpropertiesofSiO x filmsgrownbymolecularbeamdeposition:effectoftheSiconcentrationandannealingtemperature. J. Appl. Phys. 2012 , 112 ,094316..

https://henke.lbl.gov/optical_constants/asf.html.

Wang,L.M.;Li,Q.D.;Liu,S.J.;Cao,Z.X.;Cai,Y.P.;Jiao,X.C.;Lai,H.J.;Xie,W.G.;Zhan,X.Z.;Zhu,T.QuantitativedeterminationoftheverticalsegregationandmolecularorderingofPBDB-T/ITICblendfilmswithsolventadditives. ACS Appl. Mater. Interfaces 2020 , 12 ,24165−24173..

Briscoe,B.J.;Fiori,L.;Pelillo,E.Nano-indentationofpolymericsurfaces. J. Phys. D 1998 , 31 ,2395..

Views

595

Downloads

CSCD

Alert me when the article has been cited

Submit

Tools

Publicity Resources

Catalysis and Inhibition of Benzimidazole Units on Thermal Imidization of Poly(amic acid) via Hydrogen Bonding Interactions

SYNTHESIS AND CHARACTERIZATION OF HIGH MOLECULAR WEIGHT POLY(1,2-PROPYLENE CARBONATE-co-1,2-CYCLOHEXYLENE CARBONATE) USING ZINC COMPLEX CATALYST

Manipulating Hierarchical Aggregation Structure via Film-forming Kinetics Enables Organic Photovoltaics over 20% Efficiency

Improvements of Hydrophobicity and Toughness of Epoxy Coatings Modified with Hydroxyl-terminated Fluororubber

Sequence-encoded Conformation Pathways in Viscoelastic Microphase Separation of Multiblock Copolymers

Related Author

Ming-xi Yang

Hui-na Wang

Long-bo Luo

Jie-yang Huang

Ke Li

Xu Wang

Xiang-yang Liu

Yan Feng

Related Institution

State Key Laboratory of Polymer Materials Engineering, College of Polymer Science and Engineering, Sichuan University

The Key Laboratory of Low-carbon Chemistry & Energy Conservation of Guangdong Province/State Key Laboratory of Optoelectronic Materials and Technologies, Sun Yat-Sen University

⁰