PEN/BADCy Interlayer Dielectric Films with Tunable Microstructures <italic style="font-style: italic">via</italic> an Assist of Temperature for Enhanced Frequency Stability

Xi-Ting Lei; Li-Fen Tong; Ming-Zhen Xu; Yong You; Xiao-Bo Liu

doi:10.1007/s10118-020-2417-7

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PEN/BADCy Interlayer Dielectric Films with Tunable Microstructures via an Assist of Temperature for Enhanced Frequency Stability

ARTICLE | Updated：2020-05-18

- PEN/BADCy Interlayer Dielectric Films with Tunable Microstructures via an Assist of Temperature for Enhanced Frequency Stability
- Chinese Journal of Polymer Science Vol. 38, Issue 11, Pages: 1258-1266(2020)
- Affiliations：
  
  School of Materials and Energy, University of Electronic Science and Technology of China, Chengdu 610054, China
- Author bio：
  
  tonglifen0214@163.com (L.F.T.)
  liuxb@uestc.edu.cn (X.B.L.)
- Funds：
- DOI：10.1007/s10118-020-2417-7
  CLC：
- Received：10 February 2020，
  
  Revised：2020-2-28，
  
  Accepted：04 March 2020，
  
  Online First：18 May 2020，
  
  Published：14 August 2020
- Accepted：
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Lei, X. T.; Tong, L. F.; Xu, M. Z.; You, Y.; Liu, X. B. PEN/BADCy interlayer dielectric films with tunable microstructures , via, an assist of temperature for enhanced frequency stability. Chinese J. Polym. Sci. 2020, 38, 1258–1266

Xi-Ting Lei, Li-Fen Tong, Ming-Zhen Xu, et al. PEN/BADCy Interlayer Dielectric Films with Tunable Microstructures via an Assist of Temperature for Enhanced Frequency Stability[J]. Chinese Journal of Polymer Science, 2020, 38(11): 1258-1266. DOI: 10.1007/s10118-020-2417-7.
Lei, X. T.; Tong, L. F.; Xu, M. Z.; You, Y.; Liu, X. B. PEN/BADCy interlayer dielectric films with tunable microstructures , via, an assist of temperature for enhanced frequency stability. Chinese J. Polym. Sci. 2020, 38, 1258–1266 DOI： 10.1007/s10118-020-2417-7.

Xi-Ting Lei, Li-Fen Tong, Ming-Zhen Xu, et al. PEN/BADCy Interlayer Dielectric Films with Tunable Microstructures via an Assist of Temperature for Enhanced Frequency Stability[J]. Chinese Journal of Polymer Science, 2020, 38(11): 1258-1266. DOI: 10.1007/s10118-020-2417-7. DOI：

摘要

Abstract

Low dielectric interlayer films have become an important element to ensure the development of the microelectronics industry. A kind of flexible interlayer dielectrics

polyarylene ether nitrile/bisphenol A cyanate ester (PEN/BADCy) film

with good thermal stability and low frequency dependence

has been developed by solution casting method. Herein

materials were designed to incorporate bisphenol A cyanate ester as a part of blend

contributing to the frequency stability and structural integrity. The morphological study combined with electron microscopy revealed the uniform and flexible microstructure information with controllable morphology through self-polymerization of cyanate esters with different prepolymerization time and curing temperatures. The dielectric films could present high thermal stability with

180 °C. Significant improvement in the dielectric properties was achieved for the dielectric constant and loss was much stabler than neat PEN over the frequency range from 100 Hz to 5 MHz. When the prepolymerization time was 3 h and final curing temperature reached 230 °C

the dielectric constant and dielectric loss of the films were 3.36 and 0.013 at 100 kHz

respectively. The dimensional stability (CTE = 53.67 × 10

−6

−1

) was confirmed and considered beneficial to use as an interlayer dielectrics.

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references

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⁰

PEN/BADCy Interlayer Dielectric Films with Tunable Microstructures via an Assist of Temperature for Enhanced Frequency Stability

DOI：10.1007/s10118-020-2417-7

摘要

Abstract

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Keywords

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