A study has been made on the plasma polymerization of acetylene/CO
2
/H
2
in a capacitively coupled RF plasma. The monomer mixture yielded a crosslinked film with light brown color. A kinetic study is reported for the plasma polymer ization of acetylene/CO
2
/H
2
. The effects of discharge power level and reactor geometry on the rate of polymer formation are reported. The structure of the plasma polymer is investigated by IR study.
Abstract
A study has been made on the plasma polymerization of acetylene/CO
2
/H
2
in a capacitively coupled RF plasma. The monomer mixture yielded a crosslinked film with light brown color. A kinetic study is reported for the plasma polymer ization of acetylene/CO
2
/H
2
. The effects of discharge power level and reactor geometry on the rate of polymer formation are reported. The structure of the plasma polymer is investigated by IR study.
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