In a capacitively coupled RF discharge system with external electrodes
hexamethyicyclotrisiloxane was polymerized
and the effects of discharge power and plasma gas on polymer deposition rate were studied. The polymer structures and properties were studied by IR spectroscopy
XPS measurement
PGC/MS combined technique
TG analysis and contact angle measuring. The results showed that the polymers prepared in H
2
or O
2
have higher C/Si ratio in comparison with those prepared in inert gases. PGC/MS results revealed the existence of many short carbon chains in the polymer structure .TG analysis suggested that the polymers prepared in the inert gas would possess better thermal stabilities.
Abstract
In a capacitively coupled RF discharge system with external electrodes
hexamethyicyclotrisiloxane was polymerized
and the effects of discharge power and plasma gas on polymer deposition rate were studied. The polymer structures and properties were studied by IR spectroscopy
XPS measurement
PGC/MS combined technique
TG analysis and contact angle measuring. The results showed that the polymers prepared in H
2
or O
2
have higher C/Si ratio in comparison with those prepared in inert gases. PGC/MS results revealed the existence of many short carbon chains in the polymer structure .TG analysis suggested that the polymers prepared in the inert gas would possess better thermal stabilities.
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