Plasma polymerization of acetonitrile was carried out by a capacitively coupled RF plasma apparatus with external electrodes under some different reaction conditions such as discharge power. By investigating the informations provided by the polymer deposition regularities

IR spectra and elementary analysis results

the polymerization mechanism of acetonitrile in glow discharge have been investigated. The results show that acetonitrile polymerized in glow discharge mainly through hydrogen detachment for initiation at lower energy levels and the role that opening C=N triple bond played in polymerization became more important at higher energy levels.