POLYMERIZATION OF OCTAFLUOROCYCLOBUTANE IN GLOW DISCHARGE Ⅱ. ESCA AND IR CHARACTERIZATION OF POLYMER STRUCTURE*

YE Mu; CHEN Jie; LU Lizhen; CHEN Chuanzheng; Yue Jin

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POLYMERIZATION OF OCTAFLUOROCYCLOBUTANE IN GLOW DISCHARGE Ⅱ. ESCA AND IR CHARACTERIZATION OF POLYMER STRUCTURE*

Papers | Updated：2021-06-21

- POLYMERIZATION OF OCTAFLUOROCYCLOBUTANE IN GLOW DISCHARGE Ⅱ. ESCA AND IR CHARACTERIZATION OF POLYMER STRUCTURE*
- Vol. 3, Issue 4, Pages: 305-312(1985)
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- Published：20 December 1985
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YE Mu, CHEN Jie, LU Lizhen, et al. POLYMERIZATION OF OCTAFLUOROCYCLOBUTANE IN GLOW DISCHARGE Ⅱ. ESCA AND IR CHARACTERIZATION OF POLYMER STRUCTURE*[J]. 1985, 3(4): 305-312.
DOI：

YE Mu, CHEN Jie, LU Lizhen, et al. POLYMERIZATION OF OCTAFLUOROCYCLOBUTANE IN GLOW DISCHARGE Ⅱ. ESCA AND IR CHARACTERIZATION OF POLYMER STRUCTURE*[J]. 1985, 3(4): 305-312. DOI：

摘要

In a capacitively coupled discharge with external electrodes

N2 or Ar were used as plasmagas

polymerization of octafluorocyclobutane was carried out under different conditions by varyingdischarge power

pressure

plasma gas and plasma-gas/monomer ratio. Structure of polymerizedproducts was characterized by IR spectroscopy and ESCA measurement. It was found that therewere six elements in the products

i.e. C

N and H. The probably existed groups in poly-mers wer investigated. By analyzing the resolved peaks of C1S region in ESCA spectra

effect of the reaction conditions on degree of branching of the polymerized products and the relationship of the polymer structure with the mechanism of the competitive ablation and polymerization process were studied.In addition

polymer deposition process occurring in glow discharge was discussed.

Abstract

In a capacitively coupled discharge with external electrodes

N2 or Ar were used as plasmagas

polymerization of octafluorocyclobutane was carried out under different conditions by varyingdischarge power

pressure

plasma gas and plasma-gas/monomer ratio. Structure of polymerizedproducts was characterized by IR spectroscopy and ESCA measurement. It was found that therewere six elements in the products

i.e. C

N and H. The probably existed groups in poly-mers wer investigated. By analyzing the resolved peaks of C1S region in ESCA spectra

polymer deposition process occurring in glow discharge was discussed.

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