PLASMA POLYMERIZATION OF HEXAMETHYLCYCLOTRISILOXANE*

YU Zili; YE Mu; LU Lizhen; CHEN Jie

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PLASMA POLYMERIZATION OF HEXAMETHYLCYCLOTRISILOXANE*

Papers | Updated：2021-06-21

- PLASMA POLYMERIZATION OF HEXAMETHYLCYCLOTRISILOXANE*
- Vol. 7, Issue 2, Pages: 111-118(1989)
- Affiliations：
  
  1. Changchun Institute of Applied Chemistry, Academia Sinica,Changchun
  2. Academia Sinica
  3. Changchun
- Author bio：
- Funds：
- DOI：
  CLC：
- Published：20 June 1989
- Accepted：
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[1]余自力,叶牧,卢丽珍,陈捷.PLASMA POLYMERIZATION OF HEXAMETHYLCYCLOTRISILOXANE[J].Chinese Journal of Polymer Science,1989,{4}(02):111-118.

YU Zili, YE Mu, LU Lizhen, et al. PLASMA POLYMERIZATION OF HEXAMETHYLCYCLOTRISILOXANE*[J]. 1989, 7(2): 111-118.
[1]余自力,叶牧,卢丽珍,陈捷.PLASMA POLYMERIZATION OF HEXAMETHYLCYCLOTRISILOXANE[J].Chinese Journal of Polymer Science,1989,{4}(02):111-118. DOI：

YU Zili, YE Mu, LU Lizhen, et al. PLASMA POLYMERIZATION OF HEXAMETHYLCYCLOTRISILOXANE*[J]. 1989, 7(2): 111-118. DOI：

摘要

正

In a capacitively coupled RF discharge system with external electrodes

hexamethyicyclotrisiloxane was polymerized

and the effects of discharge power and plasma gas on polymer deposition rate were studied. The polymer structures and properties were studied by IR spectroscopy

XPS measurement

PGC/MS combined technique

TG analysis and contact angle measuring. The results showed that the polymers prepared in H

or O

have higher C/Si ratio in comparison with those prepared in inert gases. PGC/MS results revealed the existence of many short carbon chains in the polymer structure .TG analysis suggested that the polymers prepared in the inert gas would possess better thermal stabilities.

Abstract

In a capacitively coupled RF discharge system with external electrodes

hexamethyicyclotrisiloxane was polymerized

and the effects of discharge power and plasma gas on polymer deposition rate were studied. The polymer structures and properties were studied by IR spectroscopy

XPS measurement

PGC/MS combined technique

TG analysis and contact angle measuring. The results showed that the polymers prepared in H

or O

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